Guray Tas, Ph.D.
Director, 
Opaque Metrology Product Development
Rudolph Technologies, Inc.

2005 Researcher Category

Güray Taş is Director of Opaque Films Metrology Product Development at Rudolph Technologies, Inc. Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology and defect inspection systems used by semiconductor device manufacturers. In this role, Dr. Tas is responsible for research and development of high precision metrology methods for ultra-thin film characterization and process control in semiconductor and data storage device fabrications. 

Dr.  Taş joined Rudolph in 1997 and since then, he has held the positions of Advanced Applications Scientist, Advanced Applications Group Leader and Opaque Metrology Group Leader. He has been a key contributor to the development of the MetaPULSE product, a non-contact, non-destructive thin film characterization tool available to semiconductor and data storage industries. MetaPULSE operates based upon ‘picosecond ultrasonics’, the ultrafast optical technique licensed from Brown University where it was developed by Dr. Taş and his colleagues.

As a post-doctoral research associate at Brown University, Dr. Taş’ research focused on studies of phase transformation and interfacial adhesion in thin film structures using ultrafast optical techniques. Both of these topics are of great importance in the fabrication of microelectronic structures. In a recent experiment, he has used picosecond ultrasonics technique to investigate metal silicide phase formation and modification of interfacial bonding which results from ion implantation. 

During his post-doctoral research at the University of Illinois Urbana-Champaign, he investigated dynamical behavior of condensed matter under ultra-high shock compression using time-resolved optical microscopy and optical spectroscopy techniques. A wide variety of systems were studied, including crystalline solids, polymers, glasses, polyatomic liquids, and organized nano and microstructures. He developed a novel method to measure the vibrational spectrum of shocked materials with a picosecond time resolution which is about three orders of magnitude better than the prior state of the art. 

Dr. Taş’ dissertation research focused on studying acoustic and thermal properties of thin films and nanostructures using ultrafast optical techniques. He developed a novel method to investigate hot electron diffusion in metals by picosecond ultrasonics. In addition, he has shown that picosecond ultrasonics can be used for non-destructive characterization of ultrathin interfacial layers. He has also studied acoustic properties of liquids and interfaces between solids and liquids at hypersonic frequencies using picosecond ultrasonics. 

Güray Taş was born in Erzincan Turkey. Upon completing his undergraduate degree in Physics Education, he received a NATO Science Scholarship for his graduate studies abroad. Güray Taş received his Ph.D. in Experimental Condensed Matter Physics from Brown University and conducted post-doctoral research at the University of Illinois at Urbana Champaign and Brown University respectively.